The cleanliness level is required to be high. The air volume, temperature, humidity, pressure difference, and equipment exhaust air are controlled on demand, and the illumination and the cross-sectional wind speed of the clean room are controlled according to the design or specification. In addition, this type of clean room has extremely strict requirements on static electricity. Among them, the requirements for humidity are particularly high. Because it is easy to generate static electricity in an overly dry workshop, the CMOS integration is damaged. Generally speaking, the temperature of the electronic workshop should be controlled at about 22 °C, and the relative humidity should be controlled between 50-60% (special clean workshops have relevant temperature and humidity regulations). At this time, it can effectively eliminate static electricity and make people feel comfortable.
Requirements for dust-free workshop construction of semiconductor workshop purification project:
The chip production workshop clean room, integrated circuit clean room clean room and disk manufacturing workshop are an important part of the clean room in the electronics manufacturing industry. Because electronic products have extremely high requirements on indoor air environment and quality during the manufacturing and production process Strict, mainly to control particles and floating dust as the main object, but also made strict regulations on the temperature and humidity of the environment, fresh air volume, noise, etc.
1. The noise level (empty state) in the class 10,000 clean room for the construction of electronic manufacturing plants: should not be greater than 65dB(A)
2. The full coverage ratio of the vertical flow clean room in the clean room of the electronic manufacturing factory should not be less than 60%, and the horizontal one-way flow clean room should not be less than 40%, otherwise it will be a local one-way flow.
3. The static pressure difference between the clean room and the outdoor of the electronic manufacturing plant should not be less than 10Pa, and the static pressure difference between the clean area and the non-clean area with different air cleanliness should not be less than 5Pa
4. The fresh air volume in the class 10,000 clean room of the electronics manufacturing industry should take the maximum value of the following two items:
5. Compensate the sum of the indoor exhaust air volume and the fresh air volume required to maintain the indoor positive pressure value.
6. Ensure that the fresh air volume per person per hour in the clean room of the clean room is not less than 40m3.
7. The heater of the clean room purification air-conditioning system in the electronics manufacturing industry should be equipped with fresh air, over-temperature power-off protection, and water-free protection should be set up if point humidification is used. In cold areas, the fresh air system should be equipped with anti-freeze protection measures.
